发明名称 |
ELECTROMECHANICAL DEVICE WITH OPTICAL FUNCTION SEPARATED FROM MECHANICAL AND ELECTRICAL FUNCTION |
摘要 |
In certain embodiments, a microelectromechanical (MEMS) device includes a movable element over the substrate and an actuation electrode. The movable element includes an electrically conductive deformable layer and a reflective element mechanically coupled to the deformable layer. The reflective element includes a reflective surface. The actuation electrode is under at least a portion of the deformable layer and is disposed laterally from the reflective surface. The movable element is responsive to a voltage difference applied between the actuation electrode and the movable element by moving towards the actuation electrode.
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申请公布号 |
US2011170168(A1) |
申请公布日期 |
2011.07.14 |
申请号 |
US201113072160 |
申请日期 |
2011.03.25 |
申请人 |
QUALCOMM MEMS TECHNOLOGIES, INC. |
发明人 |
ENDISCH DENIS;MIGNARD MARC |
分类号 |
G02B26/08;B05D3/10 |
主分类号 |
G02B26/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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