| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a piezoelectric vibration device superior in a vibration resistance and an impact resistance. <P>SOLUTION: In a yaw rate sensor apparatus 7, a yaw rate sensor element 2 is fixed to a support substrate 71 by fixing sections 72a, 72b. The fixing sections 72a, 72b have parallel sections 73a, 73b, and raised sections 74a, 74b, fix the yaw rate sensor element 2 at fixing section ends 75a, 75b of the raised sections 74a, 74b, and support the yaw rate sensor element 2 in a space above the support substrate 71 so as to cause the yaw rate sensor element 2 to be parallel to the support substrate 71 in the extending direction. A brace 79 is provided between surfaces of the fixing sections 72a, 72b and the support substrate 71, and mutually couples the parallel sections 73a, 73b of the fixing units 72a, 72b. <P>COPYRIGHT: (C)2011,JPO&INPIT |
