发明名称 |
METHOD OF MANUFACTURING HIGH RESOLUTION ORGANIC THIN FILM PATTERN |
摘要 |
A method of forming a high resolution organic thin film pattern, the method including forming a first organic layer on a substrate; selectively removing the first organic layer by selectively irradiating light energy onto the first organic layer, and forming a remaining part of the first organic layer as a sacrifice layer; forming a second organic layer on the substrate and the entire surface of the sacrifice layer; and lifting off the second organic layer formed on the sacrifice layer by removing the sacrifice layer using a solvent, and forming the remaining second organic layer as a second organic layer pattern.
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申请公布号 |
US2011171584(A1) |
申请公布日期 |
2011.07.14 |
申请号 |
US20100979260 |
申请日期 |
2010.12.27 |
申请人 |
SAMSUNG MOBILE DISPLAY CO., LTD.;SNU R&DB FOUNDATION |
发明人 |
SUH MIN-CHUL;LEE SIN-DOO;CHOI WOO-SUK;KIM MIN-HOI |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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