发明名称 METHOD OF MANUFACTURING HIGH RESOLUTION ORGANIC THIN FILM PATTERN
摘要 A method of forming a high resolution organic thin film pattern, the method including forming a first organic layer on a substrate; selectively removing the first organic layer by selectively irradiating light energy onto the first organic layer, and forming a remaining part of the first organic layer as a sacrifice layer; forming a second organic layer on the substrate and the entire surface of the sacrifice layer; and lifting off the second organic layer formed on the sacrifice layer by removing the sacrifice layer using a solvent, and forming the remaining second organic layer as a second organic layer pattern.
申请公布号 US2011171584(A1) 申请公布日期 2011.07.14
申请号 US20100979260 申请日期 2010.12.27
申请人 SAMSUNG MOBILE DISPLAY CO., LTD.;SNU R&DB FOUNDATION 发明人 SUH MIN-CHUL;LEE SIN-DOO;CHOI WOO-SUK;KIM MIN-HOI
分类号 G03F7/20 主分类号 G03F7/20
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