发明名称 INSULATION DEVICE OF SINGLE CRYSTAL GROWTH DEVICE AND SINGLE CRYSTAL GROWTH DEVICE INCLUDING THE SAME
摘要 <p>Provides are an insulation device of a single crystal growth device and a single crystal growth device including the same. The insulation device is installed inside a chamber of the single crystal growth device and the insulation device includes a plurality of insulation blocks that are spaced by a first distance.</p>
申请公布号 WO2011083898(A1) 申请公布日期 2011.07.14
申请号 WO2010KR04775 申请日期 2010.07.21
申请人 LG SILTRON INC.;LEE, SANG-HOON;OH, HYUN-JUNG;CHOI, IL-SOO 发明人 LEE, SANG-HOON;OH, HYUN-JUNG;CHOI, IL-SOO
分类号 C30B15/00;C30B29/06;C30B35/00;H01L21/02 主分类号 C30B15/00
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