INSULATION DEVICE OF SINGLE CRYSTAL GROWTH DEVICE AND SINGLE CRYSTAL GROWTH DEVICE INCLUDING THE SAME
摘要
<p>Provides are an insulation device of a single crystal growth device and a single crystal growth device including the same. The insulation device is installed inside a chamber of the single crystal growth device and the insulation device includes a plurality of insulation blocks that are spaced by a first distance.</p>
申请公布号
WO2011083898(A1)
申请公布日期
2011.07.14
申请号
WO2010KR04775
申请日期
2010.07.21
申请人
LG SILTRON INC.;LEE, SANG-HOON;OH, HYUN-JUNG;CHOI, IL-SOO