| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a region divided substrate more reducing a resistance of an extraction conductive region compared with conventional divided substrates when a partial region is used as the extraction conductive region, using an arbitrary substrate material such as a conductive, semiconductive, or insulating material, and having fewer limitations in its application range, and a semiconductor device including the same, and also to provide their manufacturing methods. <P>SOLUTION: The region divided substrate A10 provided with: a substrate 30 divided into a plurality of partial regions Ce by trenches 31a formed so as to penetrate the substrate 30 from a first surface S1 to a second surface S2 of the substrate 30; a conductive layer 35 having an electric conductivity higher than an electric conductivity of the substrate 30 on a side wall of each of the partial regions Ce formed by the trenches 31a from a side of the first surface S1 to a side of the second surface S2, and; an insulating member 31b embedded in each of the trenches 31a through the conductive layer 35. <P>COPYRIGHT: (C)2011,JPO&INPIT |
