| 摘要 |
PROBLEM TO BE SOLVED: To provide a vibrating mirror element which accurately reflects light at a mirror part. SOLUTION: The vibrating mirror element 100 includes: a cantilever-shaped driving part 31 which extends in Y-direction in a straight line form and includes an end part 31a formed on Y1 side, an end part 31b formed on Y2 side, and a connection part 31c formed on the end part 31b side; a mirror supporting part 32 which is connected to the connection part 31c of the driving part 31 and so formed to have substantially the same inclination as that of the connection part 31c when the driving part 31 drives; and an X-direction optical scanning part 10 which is turned around the turning center R2 extending in X-direction by being supported by the mirror supporting part 32 so as to have substantially the same inclination as that of the connection part 31c, wherein the turning center R2 is disposed at the position which passes through substantially the center R4 of a straight line (tangential lines C1 and D1) which extends in the Y-direction connecting the end part 31a and the connection part 31c of the diving part 31 when the driving part 31 does not drive. COPYRIGHT: (C)2011,JPO&INPIT
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