| 摘要 |
PROBLEM TO BE SOLVED: To provide a washing apparatus which enables efficient washing with ozone water, and an ozone water generator which can be used in the washing apparatus. SOLUTION: An electronic component washing apparatus 1 includes an ozone gas concentrating portion 30 for concentrating ozone gas, an ozone gas dissolving portion 50 for dissolving the concentrated ozone gas, obtained in the ozone gas concentrating portion 30, in water to obtain ozone water, and a washing portion 70 for washing electronic components with the ozone water obtained in the ozone gas dissolving portion 50. COPYRIGHT: (C)2011,JPO&INPIT
|
