| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an epitaxial film which improves the yield, and to provide a light-emitting element. <P>SOLUTION: The epitaxial film 30 includes a substrate 32, a first conductivity-type clad layer formed on the substrate 32; an active layer 35 formed on the first conductivity-type clad layer; and a second conductivity-type clad layer formed on the active layer 35. At least one of the first and second conductivity-type clad layers is an In<SB>x</SB>Al<SB>y</SB>Ga<SB>(1-x-y)</SB>N layer (0<x<1, 0<y<1, 0<x+y<1), and the dispersion in the thickness lies within 6%. <P>COPYRIGHT: (C)2011,JPO&INPIT |
