| 摘要 |
PROBLEM TO BE SOLVED: To further improve response speed by shortening a drift hour of ions, to raise efficiency in gas amplification caused by an electron avalanche, to improve the efficiency of ion detection, and to improve the image quality of a low-vaccum secondary electron image. SOLUTION: A charged particle beam device which is equipped with a sample board to hold a sample, a sample chamber to store the sample board, an irradiating optical system to irradiate the charged particle beams in the sample chamber, an objective lens to converge the charged particle beams on the sample, has a detector in a space between the objective lens and the sample to detect the secondary charged particles released from the sample by the irradiation of the charged particle beam in which the detector is constituted of a first electrode applied with a positive voltage and at least two sheets of second electrodes which are applied with lower voltages than the positive voltage and sandwich the first electrode. The electric current flowing in either or all of the electrodes is detected as a signal current. COPYRIGHT: (C)2011,JPO&INPIT |
