发明名称 ROLL IMPRINTING APPARATUS
摘要 One embodiment of the present invention relates to a roll imprinting apparatus which simultaneously performs a pattern imprinting process and a hardening process on a coating layer, to thereby simplify a substrate-patterning process. The roll imprinting apparatus according to one embodiment of the present invention comprises: a pattern roll which is arranged to perform an imprinting process on a substrate being transferred, and which rotates to imprint the pattern formed on the surface thereof onto the substrate; and a press roll which rotates at the side opposite the pattern roll with the substrate interposed between the pattern roll and the press roll, in order to press the substrate. The pattern roll comprises a cylinder made of a transparent material, the interior of which has a space, the outer surface of which has the pattern, and which has an ultraviolet-proof layer selectively formed on the portion with the pattern or between the patterns; and a UV lamp arranged in the space of the cylinder to irradiate ultraviolet rays.
申请公布号 WO2011052895(A3) 申请公布日期 2011.07.14
申请号 WO2010KR06609 申请日期 2010.09.29
申请人 KOREA INSTITUTE OF MACHINERY & MATERIALS;JO, JEONG-DAI;YU, JONG-SU;YOON, SEONG-MAN;KIM, DONG-SOO;KIM, KWANG-YOUNG 发明人 JO, JEONG-DAI;YU, JONG-SU;YOON, SEONG-MAN;KIM, DONG-SOO;KIM, KWANG-YOUNG
分类号 H01L21/027 主分类号 H01L21/027
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