| 摘要 |
PROBLEM TO BE SOLVED: To provide an environment control type electron beam device, in which the attachment, removal, position adjustment, and replacement of a differential exhaust diaphragm can be carried out within a short time by an easy work, without having to open to atmosphere the inside of a sample chamber, and high resolution becomes possible. SOLUTION: An electron microscope includes an electron gun for emitting electron beams; an objective lens to converge a primary electron beam emitted from the electron gun onto a sample; a sample chamber arranged beneath the objective lens; a sample fine adjustment device equipped inside the sample chamber; and an exhaust system for controlling vacuum in the sample chamber. A replacement member for attaching and removing the differential exhaust diaphragm is installed in the sample fine adjustment device, and the differential exhaust diaphragm is attached with and removed with respect to the objective lens, by driving the replacement member owing to the sample fine adjustment device. COPYRIGHT: (C)2011,JPO&INPIT |
