| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a package with high mechanical strength, and a vibrating device using the same. <P>SOLUTION: A vibrating gyro 1 as the vibrating device includes: a package 10 having an internal space T1, which is formed of a package base 10a having a recess formed by stacking a second layer substrate 12, a third layer substrate 13, and a fourth layer substrate 14 on a first layer substrate 11, and a lid 19 joined to the recess of the package base 10a and an upper end of the package base 10a; and a gyro vibrating piece 20 and an IC chip 30 housed in the internal space T1. The package 10 has a porous portion 25 formed of a communication hole 25a communicating between the internal space T1 and the outside and a porous body 25b buried in the communication hole 25a, and a metal film 45 closing the outside of the porous portion 25 and the internal space T1 is arranged on the outside of the porous portion 25 to airtightly seal the inside of the package 10. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
