APPARATUS FOR PROCESSING A SUBSTRATE USING A SUPERCRITICAL FLUID

摘要

PURPOSE: An apparatus for processing a substrate using a supercritical fluid is provided to prevent the decrease of the pressure of a space in which a substrate is processed by completely closing a separation chamber with a fastening ring. CONSTITUTION: In an apparatus for processing a substrate using a supercritical fluid, a substrate is arranged inside a lower chamber(110) and form a first gear tooth(112) on the outer circumference of the lower chamber. An upper chamber(120) and a lower chamber are combined with each other and forms a closed space for processing the substrate. The upper chamber has a second gear tooth corresponding to first gear tooth in the outer circumference. A fastening ring(130) is installed in the circumference of the upper and lower chamber and is rotatable and a third gear tooth engaging with the first and second gear tooth. An insertion groove is formed to receive the first gear tooth and the second gear tooth.