| 摘要 |
PURPOSE: A processing liquid supply module and a substrate processing device with the same are provided to prevent damage when a processing liquid supply pipe vibrates. CONSTITUTION: A processing liquid supply pipe(210) is horizontally expanded onto a substrate(10). The processing liquid supply pipe supplies processing liquid onto the substrate through a plurality of nozzles. A driving unit provides driving power to the processing liquid supply pipe to vibrate the processing liquid supply pipe. A power providing unit(230) provides driving power from the driving unit to the processing liquid supply pipe by a belt vibrating method.
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