发明名称 COATING COMPOSITION CONTAINING POLYSILAZANE
摘要 PURPOSE: A coating composition is provided to ensure excellent applicability and filling property and to form a silica layer having excellent membrane properties. CONSTITUTION: A coating composition includes perhydropolysilazane and a solvent. The molecular weight slope of the perhydropolysilazane has respective maximum values in molecular weight of 800~2,500 and molecular weight of 3,000~8,000, wherein a ratio(Mw/Mn) of average molecular weight(Mw) and number average molecular weight(Mn) is 6~12. The content of the perhydropolysilazane is 10~25 wt% based on the total weight of the coating composition.
申请公布号 KR20110081043(A) 申请公布日期 2011.07.13
申请号 KR20100136639 申请日期 2010.12.28
申请人 AZ ELECTRONIC MATERIALS (JAPAN) K.K. 发明人 HAYASHI MASANOBU
分类号 C09D183/16;B05D3/00;C01B33/00;H01L21/316 主分类号 C09D183/16
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