TREATMENT SOLUTION COATING APPARATUS AND METHOD FOR CLEANING HEAD OF THE SAME

摘要

PURPOSE: A treatment solution coating apparatus and a method for cleaning a head of the same are provided to improve cleansing efficiency while reducing manufacturing costs, since there is no process for minimizing the contact area to remaining washing solution. CONSTITUTION: In a treatment solution coating apparatus and a method for cleaning a head of the same, an object is mounted in a substrate support member. At least one head coats a washing solution(20) on the object which is mounted in the substrate support member. At least one wire is arranged in parallel with the discharge surface of the head through which a washing solution is discharged and rakes out the remaining solution on the discharge surface.