MANUFACTURING METHOD OF METAL OXIDE NANOTUBES FOR DETECTING GASES AND METAL OXIDE GAS SENSOR USING THE SAME

摘要

PURPOSE: A method for manufacturing gas detecting metal oxide-based nano-tube and a metal oxide-based gas sensor using the same are provided to increase the sensitivity with respect to target gas by increasing the surface area and the length of the nano-tube. CONSTITUTION: A nano fiber template(112) is formed by spinning a polymer solution. A metal oxide-based thin film(124) for detecting gas is deposited on the template through an atomic layer deposition method, and an intermediate structure is obtained. The intermediate structure is thermally treated, and the template is eliminated. Metal oxide-based nano-tube(134) is formed. A metal oxide-based gas sensor includes the network structure of nano-tubes and an electrode applying power to the network structure.