SEMICONDUCTOR DEVICES HAVING DUAL TRENCHES AND METHODS OF FABRICATING THE SAME, AND ELECTRONIC SYSTEM HAVING THE SAME

摘要

PURPOSE: A semiconductor device with dual trenches and a manufacturing method thereof, and an electronic system are provided to obtain a stable active separation area and reduce the amount of using silazane insulators, thereby increasing production. CONSTITUTION: A cell area includes a cell trench. A semiconductor substrate includes a peripheral area which has a peripheral trench. A cell trench is filled with a core insulator(260) which has high mobility. The peripheral trench is filled with a core insulating material.