| 摘要 |
PURPOSE: A manufacturing device of an organic EL device and a method of manufacturing the organic EL device and a layer forming device and a layer forming method are provided to reduce production costs since the loss of raw material is low and to increase productivity. CONSTITUTION: In a manufacturing device of an organic EL device and a method of manufacturing the organic EL device and a layer forming device and a layer forming method, a shadow mask(81) aligns a deposition source, helping a depositing material to be deposited on a substrate(6), to be fitted to the substrate. In a vacuum chamber, a transfer unit moves a substrate. A controller moves the substrate to a deposition position. A deposition unit loads N substrates in a vacuum chamber, and it loads N-th substrate inside vacuum chamber when a first substrate is deposited and unloads the first substrate when second substrate is deposited.
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