| 摘要 |
PURPOSE: A drive control method and device for a micro mobile structure of a compact electromechanical system are provided to brake the residual resonance response in real time by feeding components caused by the residual resonance response back to a drive signal. CONSTITUTION: A drive control method for a micro mobile structure of a compact electromechanical system comprises a step of generating drive wave that is given weight by the reverse mechanical resonance frequency property(13) of a structure having a natural mechanical resonance frequency property, a step of driving the structure with the drive wave, and a step of controlling the drive characteristic by offsetting the mechanical resonance characteristic of the structure.
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