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发明名称
LOW PRESSURE POLISHING METHOD AND APPARATUS
摘要
申请公布号
EP2342047(A1)
申请公布日期
2011.07.13
申请号
EP20090792273
申请日期
2009.09.04
申请人
EPOXI-TECH, INC.
发明人
PALUSHAJ, SIMON
分类号
B24B7/18;B24D13/06;B24D13/16
主分类号
B24B7/18
代理机构
代理人
主权项
地址
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