| 摘要 |
PURPOSE: A coupling and a treatment solution supply device including the same are provided to prevent the generation of particles caused by the abrasion of balls of the coupling by supplying treatment solution through a sleeve to the balls. CONSTITUTION: A coupling(200) for connecting first and second pipes comprises first and second sleeves(202,206), a tubular body(204), a plurality of balls(208,216), and retainers(210,218). The first sleeve is connected to the first pipe. The body is connected to the first sleeve. The second sleeve is inserted into the body and connected to the second pipe. The balls are arranged between the body and the second sleeve to let the second pipe rotate. The retainer has a plurality of holes which receive the balls in order to keep the balls from contacting each other.
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