ELECTROSTATIC CHUCK UNIT AND APPARATUS FOR PROCESSING A SUBSTRATE HAVING THE SAME

摘要

PURPOSE: An electrostatic chuck unit and a substrate processing device with the same are provided to adjust the height of a focus ring about an electrostatic chuck. CONSTITUTION: An electrostatic chuck(120) is arranged on a base unit(110) and supports a substrate. A focus ring surrounds the electrostatic chuck and focuses a processing gas on the substrate. A driving unit(140) is connected to the focus ring through the base unit. A driving unit is connected to the bottom of the focus ring through a penetration hole.