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发明名称
Substrate conveying arm
摘要
申请公布号
EP2168727(B1)
申请公布日期
2011.07.13
申请号
EP20090011925
申请日期
2009.09.18
申请人
USHIO DENKI KABUSHIKI KAISHA
发明人
OKAMOTO, HIDEKI;MINOBE, TAKESHI;TAKIURA, HIROFUMI
分类号
B25J15/06
主分类号
B25J15/06
代理机构
代理人
主权项
地址
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