| 摘要 |
PURPOSE: A stator fixing structure of a linear actuator is provided to prevent a fault generated due to a misalignment when the linear actuator is used in a manufacturing process of semiconductor etc. CONSTITUTION: A linear actuator(300) comprises a base frame(310), a transfer table(350), a linear motion guide(320), a stator(330), and a movable element(340). A pair of projection parts are formed on the top of a insertion hole and are expended in the longitudinal direction. A fixing plate(360) is arranged inside the insertion hole after inserting the stator into the insertion hole in the longitudinal direction. A push bolt(375) pressurizes the fixing plate and the stator in the longitudinal direction. |
