| 摘要 |
PURPOSE: A substrate processing apparatus including a chuck pin is provided to stably fix the substrate by preventing thermal deformation of a chuck pin even in a special process. CONSTITUTION: A spin chuck(400) settles a substrate. A chuck pin(100) is positioned at an upper side of the spin chuck and fixes the substrate. A rod is fixed with the chuck pin. The chuck pin is made of metal or nonmetal materials. The chuck pin includes a support part, a substrate contact part, a coupling part and a hooking part. The substrate contact part, formed on the support part, gets contacted with a side of the substrate and fixes the substrate. The coupling part, formed under the support part, is coupled with the rod. The hooking part, positioned between the support part and the coupling part, gets closely contact with the upper part of the spin chuck.
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