发明名称 DRAM cell with enhanced capacitor area and the method of manufacturing the same
摘要 A dynamic random access memory (DRAM) cell and the method of manufacturing the same are provided. The DRAM cell includes a cell transistor and a cell capacitor. The cell capacitor includes a first, second and third dielectric layer, and a first, second and third capacitor electrode. The first dielectric layer is located on a first capacitor electrode. The second capacitor electrode is located on top of the first dielectric layer. The second dielectric layer is located on the second capacitor electrode. The third capacitor electrode is located on the second dielectric layer and is electrically connected with the drain. The third dielectric layer is located between the third capacitor electrode and the gate for isolating the gate from the third capacitor electrode.
申请公布号 US7977726(B2) 申请公布日期 2011.07.12
申请号 US20070896418 申请日期 2007.08.31
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 SIM JAI-HOON
分类号 H01L27/108 主分类号 H01L27/108
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