发明名称 |
Saw debris reduction in MEMS devices |
摘要 |
An improved MEMS device and method of making. Channels are formed in a first substrate around a plurality of MEMS device areas previously formed on the first substrate. Then, a plurality of seal rings are applied around the plurality of MEMS device areas and over at least a portion of the formed channels. A second substrate is attached to the first substrate, then the seal ring surrounded MEMS device areas are separated from each other. The channels include first and second cross-sectional areas. The first cross-sectional area is sized to keep saw debris particles from entering the MEMS device area.
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申请公布号 |
US7977786(B2) |
申请公布日期 |
2011.07.12 |
申请号 |
US20080180320 |
申请日期 |
2008.07.25 |
申请人 |
HONEYWELL INTERNATIONAL INC. |
发明人 |
RIDLEY JEFF A.;GLENN MAX;NOHAVA JAMES C.;HORNING ROBERT D.;REKSTAD JANE |
分类号 |
H01L21/00;H01L23/04 |
主分类号 |
H01L21/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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