发明名称 Multilayer structure with zirconium-oxide tunnel barriers and applications of same
摘要 A multilayer structure with zirconium-oxide tunnel barriers. In one embodiment, the multilayer structure includes a first niobium (Nb) layer, a second niobium (Nb) layer, and a plurality of zirconium-oxide tunnel barriers sandwiched between the first niobium (Nb) layer and the second niobium (Nb) layer, wherein the plurality of zirconium-oxide tunnel barriers is formed with N layers of zirconium-oxide, N being an integer greater than 1, and M layers of zirconium, M being an integer no less than N, such that between any two neighboring layers of zirconium-oxide, a layer of zirconium is sandwiched therebetween.
申请公布号 US7977668(B2) 申请公布日期 2011.07.12
申请号 US20080126726 申请日期 2008.05.23
申请人 NORTHWESTERN UNIVERSITY 发明人 NEVIRKOVETS IVAN;KETTERSON JOHN;CHERNYASHEVSKYY OLEKSANDR;SHAFRANIUK SERHII
分类号 H01L29/72 主分类号 H01L29/72
代理机构 代理人
主权项
地址