发明名称 Methods for producing solid-state imaging device and electronic device
摘要 A method for producing a solid-state imaging device includes steps of: forming transfer electrodes on a substrate having a plurality of light-sensing portions through a gate insulating layer so that the light-sensing portions are exposed; forming a planarized insulating layer on the substrate to cover the transfer electrodes formed on the substrate; forming openings in the planarized insulating layer so that each of the transfer electrodes is partly exposed out of the planarized insulating layer at a predetermined position; forming a wiring material layer so that the openings are filled with the wiring material layer; forming a resist layer on the wiring material layer; exposing and developing the resist layer so that only the resist layer in a predetermined area covering the openings is left; and patterning the wiring material layer using the exposed and developed resist layer to form connection wirings connected to the transfer electrodes by the openings.
申请公布号 US7977140(B2) 申请公布日期 2011.07.12
申请号 US20090382713 申请日期 2009.03.23
申请人 SONY CORPORATION 发明人 TAKEDA TAKESHI;ANDO YUKIHIRO;OKAMOTO MASAKI;OKADA MASAYUKI;TAKIMOTO KAORI;KUGIMIYA KATSUHISA;KIMURA TADAYUKI
分类号 H01L21/00;H01L21/339;H01L27/148;H01L29/762;H04N5/359;H04N5/367;H04N5/3728 主分类号 H01L21/00
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