发明名称 Asymmetric source and drain field effect structure
摘要 A semiconductor structure, such as a CMOS semiconductor structure, includes a field effect device that includes a plurality of source and drain regions that are asymmetric. Such a source region and drain region asymmetry is induced by fabricating the semiconductor structure using a semiconductor substrate that includes a horizontal plateau region contiguous with and adjoining a sloped incline region. Within the context of a CMOS semiconductor structure, such a semiconductor substrate allows for fabrication of a pFET and an nFET upon different crystallographic orientation semiconductor regions, while one of the pFET and the nFET (i.e., typically the pFET) has asymmetric source and drain regions.
申请公布号 US7977712(B2) 申请公布日期 2011.07.12
申请号 US20080059059 申请日期 2008.03.31
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ZHU HUILONG;LIN HONG;SAENGER KATHERINE L.;XIU KAI;YIN HAIZHOU
分类号 H01L29/04 主分类号 H01L29/04
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