发明名称 Angular velocity sensor and angular velocity sensor device
摘要 Proposed is a horizontally located angular velocity sensor hardly affected by a translational acceleration in a lateral direction, and in which a fixed section is easily fixed. The angular velocity sensor includes a fixed section fixed on a support surface. On both sides of the fixed section, an arm section of an upper detection arm and a pair of upper drive arms extending along a plane parallel to the support surface, and an arm section of a lower detection arm and a pair of lower drive arms extending along the plane parallel to the support surface are coupled, respectively. The upper detection arm and the pair of upper drive arms are coupled without the fixed section in between, and the lower detection arm and the pair of lower drive arms are coupled without the fixed section in between.
申请公布号 US7975545(B2) 申请公布日期 2011.07.12
申请号 US20070987996 申请日期 2007.12.06
申请人 TDK CORPORATION 发明人 NOGUCHI TAKAO;TOCHI KENICHI;UNNO KEN;NAMIKAWA TATSUO
分类号 G01P9/04 主分类号 G01P9/04
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