| 摘要 |
An electrostatic actuator includes a fixed electrode formed on a substrate, a movable electrode provided so as to oppose the fixed electrode with a predetermined gap therebetween, a driving unit generating electrostatic force between the fixed electrode and the movable electrode and moving the movable electrode, insulating films provided on opposing faces of the fixed electrode and the movable electrode, at least one of the insulating films having a layered structure of silicon oxide and a dielectric material whose relative permittivity is higher than the relative permittivity of the silicon oxide, and a surface protection film provided one or both of the insulating films and made of a ceramics-based hard film or a carbon-based hard film.
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