| 摘要 |
PURPOSE: A laser machining device and a method thereof are provided to minimize side effects resulting from particles or bubble by quickly stabilizing an unstable state of a work piece during machining. CONSTITUTION: A laser machining device comprises a laser generator(110), an optical modulator(120), an object lens(160), a stage part(170), and a heat treatment unit(180). The laser generator generates laser beam. The optical modulator divides the laser beam into a first path and a second path. The object lens condenses the laser beam separated into the first path to be irradiated to a target position. The stage part is able to control the distance to the object lens. The heat treatment unit performs heat treatment to the target position with the laser beam irradiated. |
