| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus and method for surely and stably separating, removing, and storing a minute test piece without contaminating the minute test piece and an area around the minute test piece. SOLUTION: A test piece including an area to be observed is separated from a sample substrate by ion beam sputtering. A beam member is used to remove the test piece from the sample substrate. After the test piece is moved onto a mounting table on which the test piece is mounted, the test piece is stored by separating the beam member and the test piece from each other. The beam member serves to push in a sample for retention and pull out the sample for separation. The beam member has a tip that is narrower than a root of the beam member, and the tip is in a divided shape. The beam member is composed of a rod-like member for holding the test piece by force of elastic deformation in a site, obtained by the shape, in which the test piece is held. COPYRIGHT: (C)2011,JPO&INPIT |
