| 摘要 |
<p>PURPOSE: An up/down transfer apparatus of a semiconductor unit for a test handler is provided to reduce a manufacturing cost of a test hander by separately installing a vacuum ejector and a solenoid valve. CONSTITUTION: A plurality of air cylinders(10) are continuously arranged in a constant interval within a housing(1). An elevation suction body(20) is installed at a bottom of each air cylinder to be vertically moved. An LM guide(30) guides a horizontal sliding movement of each of the air cylinders(10) within the housing. A vacuum ejector(40) attaches or detaches a plurality of elevation suction bodies to or from a semiconductor unit. A solenoid valve(50) is used for vertically moving the elevation suction body by controlling a direction of air pressure. A pitch stopper(60) is used for adjusting a pitch between the air cylinders. A link member(70) enables a simultaneous movement of the air cylinders in the same interval.</p> |
