| 摘要 |
PURPOSE: A wafer inspecting device is provided to improve the reliability of data by automatically inspecting two different evaluation items of Cu Haze and DSOD. CONSTITUTION: A loading unit loads a chemically completed wafer on a cassette. A robot mounts wafers from each cassette on a transfer jig one by one. A transfer unit transfers the wafer mounted on the transfer jig to an inspection zone. An inspecting unit inspects the transferred wafer. An unloading unit returns the wafer which is completely inspected to the cassette.
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