| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a silicon nitride sintered compact having excellent thermal shock resistance. <P>SOLUTION: The thermal shock resistant silicon nitride sintered compact contains 0.05-10 mass% magnesium expressed in terms of oxide, wherein the surface area ratio of a particle having major axis diameter of ≤0.5 times of average major axis diameter in the observation of the sintered compact cross-section is ≤20% and the surface area ratio of the particle having a major axis diameter of ≥1.5 times of the average major axis diameter is ≥25% and the total of these ratios is 30-70%. The difference of the average major axis diameter between the surface and the inside of the sintered compact is ≤10%. The sintering is carried out in a container having at least an inner surface composed of nitride and provided with ≥0.01 g/cm<SP>3</SP>atmosphere forming powder to the volume of the container. <P>COPYRIGHT: (C)2011,JPO&INPIT |
