| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily and rapidly perform maintenance work on a stage device including a weight canceling device. <P>SOLUTION: A base frame 14 for guiding an X coarse motion stage 23X in an X axis direction largely protrudes into a +X side than a surface plate 12 that guides a weight canceling device 40 in a normal use period of an exposure apparatus including an exposure operation, and can place the weight canceling device 40 at a position out of the surface plate 12. Consequently, the maintenance work on the weight canceling device 40 can be performed from below the device while a fine motion stage 50 as a support object of the canceling device is placed above the weight canceling device 40. By moving the weight canceling device 40 downward at a position out of the surface plate 12, the weight canceling device 40 can be dismounted from a substrate stage device PST, and thereby, the weight canceling device 40 can be easily carried to the outside from the substrate stage device PST. <P>COPYRIGHT: (C)2011,JPO&INPIT |
