| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a position adjustment device that can easily adjust relative positions of a target material supplying portion and a laser beam of light. <P>SOLUTION: The position adjustment device adjusts relative positions of the supplying portion 14 for supplying a target material and a laser beam of light L for exciting the supplied target material. To accomplish this, the position adjustment device includes to-be-irradiated members WX, WY disposed in a predetermined positional relationship with the supplying portion and transfer devices 71, 72 that move the members WX, WY relative to the laser beam of light while holding the predetermined positional relationship between the supplying portion and the members WX, WY. Based on a consequence of casting the laser light on the members WX, WY, the position adjustment device adjusts the relative positions of the supplying portion and the laser light. <P>COPYRIGHT: (C)2011,JPO&INPIT |
