| 摘要 |
PROBLEM TO BE SOLVED: To provide a cleaning device which can save water consumption for a heat exchanger by stopping water supply to the heat exchanger and starting water supply to the heat exchanger upon the turning of the gas eliminated from the cleaning tank to vapor, in the case that the gas eliminated from the cleaning tank is air. SOLUTION: This cleaning device is constituted of the following members: the cleaning tank 3 stores a liquid and a material to be cleaned 2 is soaked in the stored liquid. A pressure reducing means 7 includes the heat exchanger 35 for cooling the gas eliminated from the cleaning tank 3 using cooling water and a vacuum pump 37 installed downstream of the heat exchanger 35. For operating procedures, after starting the reduction of the internal pressure of the cleaning tank 3 by actuating the vacuum pump 37 in such a state that the water supply to the heat exchanger 35 is stopped, the water supply to the heat exchanger 35 is started in preset timely manner. The preset timing is preferably decided by forecasting a boiling start point, based on the pressure or temperature of an internal gas phase part of the cleaning tank 3 and the temperature of an internal liquid phase part of the cleaning tank 3. COPYRIGHT: (C)2011,JPO&INPIT
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