| 摘要 |
A radio frequency (RF) semiconductor device includes a semiconductor substrate, a resistor film formed at one area of the semiconductor substrate, a first metal layer formed on the semiconductor substrate, a dielectric layer formed at least on the lower electrode film, a second metal layer formed on the dielectric layer, a first insulating layer having a first pad via connected with the first metal layer, a capacitor via connected with the second metal layer, and an inductor via connected with the first or second metal layer. a third metal layer includes filling parts that fill the capacitor via and the inductor via, respectively, and a second circuit line. A second insulating layer is formed on the first insulating layer to have a second pad via connected with the first pad via. A bonding pad is formed at the first and second pad vias.
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