ELECTROSTATIC CHUCK AND METHOD FOR MANUFACTURING SAME

摘要

The invention relates to an electrostatic chuck, comprising: a base; an amorphous first insulating layer formed on the base; an electrode layer for generating electrostatic force formed on the first insulating layer; and a dielectric layer formed on the electrode layer. Accordingly, the electrostatic chuck of the present invention suppresses arcing caused by the leakage of current, and achieves improved electrical characteristics and durability.