| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprint material and a processing method that can improve the mold-release characteristics of the imprint material to a template. SOLUTION: An imprint material 11 has a resin 11, that receives energy in contact with a convexo-concave pattern of a template 20 and is hardened, from a liquid state and a plurality of fine particles 13 which are contained in the resin 11 in a solid state, and have a volume shrinkage ratio that differs from that of the resin 11 upon receiving the energy. COPYRIGHT: (C)2011,JPO&INPIT |
