| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a capacitive electromechanical transducer capable of reducing generation of parasitic capacity to suppress an influence on reception sensitivity and to raise degrees of freedom of process design. <P>SOLUTION: The method for manufacturing the capacitive electromechanical transducer is provided with steps of: forming a lower electrode layer on a substrate; forming a sacrificial layer on the lower electrode layer; applying a resist layer on the sacrificial layer to form a cavity pattern; forming an insulating layer on an area including the resist layer used for formation of the cavity pattern, and after that, removing the insulating layer formed on the resist layer with the resist layer to form the insulating layer in an area except an area in which the cavity pattern is formed; forming a vibrating film on the area in which the cavity pattern is formed and the area in which the insulating layer is formed; and removing the sacrificial layer to form a cavity. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
