| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a power source device for sputtering which is capable of eliminating the failure of arc discharge suppression during sputtering. <P>SOLUTION: The power source device having a negative pole output terminal and a positive pole output terminal comprises a DC power source PS1 for sputtering, a first switch SW1 provided in the negative pole side of the DC power source for sputtering, a plurality of mutually independent choke coils L1-L4 connected in series to the first switch, a reverse direction arc preventing circuit 13 provided between the plurality of choke coils and the negative pole output terminal, a DC power source PS2 for generating reverse voltage, a second switch SW2 provided between the DC power source for generating reverse voltage and an intermediate position between the plurality of the mutually independent choke coils connected in series to each other and the reverse direction arc preventing circuit, voltage detecting parts R1, R2 for detecting the voltage generated between the negative pole output terminal and the positive pole output terminal and a controller 21 for controlling the opening and the closing of the first and second switches. <P>COPYRIGHT: (C)2011,JPO&INPIT |
