发明名称 PAD INSPECTING APPARATUS
摘要 PURPOSE: A pad inspecting apparatus is provided to check the state of a pad regardless of an ESD protection circuit by connecting a needle line to the pad. CONSTITUTION: A source power applying unit(210) is connected to a needle line on one end of the pad and applies power to a pad(230). A switching device is connected to the other end of the pad through the needle line. One side of a resistor is serially connected to the switching device and the other side thereof is grounded. A pad inspecting device inspects the state of the pad by measuring the voltage in the resistor after the power is applied to the pad when the resistor is connected to the pad by operating the switching device.
申请公布号 KR20110077511(A) 申请公布日期 2011.07.07
申请号 KR20090134115 申请日期 2009.12.30
申请人 DONGBU HITEK CO., LTD. 发明人 KIM, YEO HWANG
分类号 H01L21/66;G01R19/00;G01R31/26 主分类号 H01L21/66
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