STRIKER-TYPE PLASMA GENERATION DEVICE AND PLASMA PROCESSING DEVICE

摘要

Provided is a striker-type plasma generation device wherein contact action of a striker is stable over the long term. Said plasma generation device can generate high-quality plasma and make the most of a target material. Also provided is a plasma processing device using the provided striker-type plasma generation device. When plasma processing starts, a striker arm begins rotating (steps S2 and S3), and even after a striker tip (35) contacts a cathode (2), a servo motor (40) continues to drive the striker arm to rotate. When a reversal condition is met, namely when the load on the striker arm exceeds a prescribed value, the motor (40) is instructed to operate in reverse, and the striker tip (35) is moved away from the cathode (2) (steps S4 and S5).