发明名称 PIEZOELECTRIC DEVICE AND PIEZOELECTRIC DEVICE MANUFACTURING METHOD
摘要 A piezoelectric device includes: a first substrate; a second substrate disposed opposed to the first substrate; a third substrate disposed between the first substrate and the second substrate, a part of the third substrate forming a piezoelectric oscillating piece, and another part of the third substrate forming a frame which surrounds the piezoelectric oscillating piece; a first metal film which joins the first substrate and the frame; a second metal film which joins the second substrate and the frame; and a resin portion provided at least at any one of positions between the first substrate and the first metal film, between the frame and the first metal film, between the second substrate and the second metal film, and between the frame and the second metal film.
申请公布号 US2011163637(A1) 申请公布日期 2011.07.07
申请号 US20100972644 申请日期 2010.12.20
申请人 SEIKO EPSON CORPORATION 发明人 HASHI YUKIHIRO
分类号 H01L41/053;H01L41/22 主分类号 H01L41/053
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