申请人 |
APPLIED MATERIALS, INC.;KARUPPIAH, LAKSHMANAN;ZHANG, DAN;YAVELBERG, SIMON;ATKINSON, JIM K.;CHEN, HUNG CHIH;MANTO, NOEL;DOMIN, JONATHAN |
发明人 |
KARUPPIAH, LAKSHMANAN;ZHANG, DAN;YAVELBERG, SIMON;ATKINSON, JIM K.;CHEN, HUNG CHIH;MANTO, NOEL;DOMIN, JONATHAN |