发明名称 ROLLER ASSEMBLY FOR A BRUSH CLEANING DEVICE IN A CLEANING MODULE
摘要 <p>Embodiments described herein relate to an apparatus and method for a roller assembly that may be utilized in a brush cleaning module. In one embodiment, a roller assembly is described. The roller assembly includes an annular groove having at least two substantially parallel opposing sidewalls adapted to contact the major surfaces of a substrate along a periphery of the substrate, each of the opposing sidewalls comprising a compressible material having a pre-compressed dimension that is less than a thickness of the periphery of the substrate.</p>
申请公布号 WO2011043866(A4) 申请公布日期 2011.07.07
申请号 WO2010US45709 申请日期 2010.08.17
申请人 APPLIED MATERIALS, INC.;KARUPPIAH, LAKSHMANAN;ZHANG, DAN;YAVELBERG, SIMON;ATKINSON, JIM K.;CHEN, HUNG CHIH;MANTO, NOEL;DOMIN, JONATHAN 发明人 KARUPPIAH, LAKSHMANAN;ZHANG, DAN;YAVELBERG, SIMON;ATKINSON, JIM K.;CHEN, HUNG CHIH;MANTO, NOEL;DOMIN, JONATHAN
分类号 H01L21/302 主分类号 H01L21/302
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